Controlling dopant concentration near the silicon surface is increasingly important for ultrashallow junctions and nanoscale devices. Mixed monolayer doping (MMLD) offers a surface-chemistry-based approach in which dopant-containing molecules are mixed with nondopant molecules to tune the amount...
Source: [Phys.org](https://phys.org/news/2026-09-plasma-treatment-reveal-molecular-coatings.html)